Microelectronically Fabricated LiCoO2/SiO2/Polysilicon Power Cells
نویسندگان
چکیده
Monolithic on-chip integration was successfully demonstrated in Si CMOS technology. The enhanced development in electronics and optoelectronics technologies has increased the need for an integrative power unit that will also decrease conduction leaks, power losses, and cross talking [1]. We present a rechargeable, all-solid-state thin-film battery compatible with microelectronics technology in its materials, fabrication method, and applications.
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تاریخ انتشار 2005